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Home / Products / CLC / FA De-cap & Xsec激光双头开封剖面机实验室站立型
FA De-cap & Xsec
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FA De-cap & Xsec激光双头开封剖面机实验室站立型
SKU: SYD000088
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基本配置

*标配10瓦气冷绿光激光器+5瓦紫外激光器+12瓦红外激光器,可升级12瓦水冷绿光激光器,30瓦红外激光器*标配专业版FA Triple软件。

*标配无级变焦视觉系统,可选配升级高清相机。

*标配150*600mm行程XY自动平台,扩大激光加工及显微视觉尺寸,无损PCBA直接开封已贴片的多个芯片,方便后续电测;可切割PCB板分离芯片,可切割金属封装壳,可剖面芯片晶圆层、焊点球。

 

激光器

标配:10瓦0.5μm气冷绿色波长标准型芯片剖面定制激光器+5瓦355nm紫外波长增强型芯片剖面专用激光器+12瓦1μm红外波长标准型芯片开封定制激光器,去除金属封装外壳,剖面切割晶圆层,去除环氧树脂封装层,无损晶圆层和邦定线

选配:30瓦1μm红外波长增强型芯片开封专用激光器,可去除含大颗粒填充物的封装层,无损晶圆层和邦定线

选配:12瓦532nm水冷绿色波长增强型芯片剖面专用激光器,可去除更厚金属封装层,更快剖面切割晶圆层

 

光路设计

标配:高速振镜光路传输,最大开封尺寸 33X33mm, 适用大尺寸芯片开封。+高精度激光切割头,配合XY自动平台,最大切割范围150X600mm

 

计算机

标配:笔记本电脑或NUC微型电脑,WIN7系统,液晶显示,键盘鼠标

 

软件

标配:FA Triple(激光失效分析-三头专业版)

选配:软件模块 - 酸处理垫切割

 

视觉

标配:60-5mm视野,12X电动无级变焦镜头,标准工业相机,适用较大尺寸芯片

标配:12-1mm视野,12X电动无级变焦镜头,标准工业相机,适用微小尺寸芯片

标配:切透观察镜头,150倍放大

选配:视觉系统升级为5百万高清相机

选配:开封露邦定线自动停止功能,节省试样时间

选配:自动找焦感应器,可编程控制焦距焦深,精准记录复制激光开封参数配方。

 

工作台

标配:可编程激光头Z轴运动 (最大行程75mm)

标配:自动对中芯片夹具 (带B轴60度旋转) +芯片剖面分析专用三阶梯夹具

标配:150X600mm行程XY自动平台,扩大激光加工及显微视觉尺寸,精准定位芯片开封、剖面、PCB切割位置。

选配:Theta平面旋转位置微调夹具,确保非方形芯片定位准确

选配:制冷顶吹器,保证极细邦定线无损

选配:制冷底板,保证温度敏感晶圆层无损

选配:机柜顶三色警示灯,符合作业安全规范

 

排烟器

选配:静音型烟尘排放器

选配:静音型烟尘排放器 - 滤芯

选配:离子除尘器,符合高洁净度规范

 

附件

选配:红外激光探测观察器,用于激光维护和激光泄露安全检查

选配:激光保护眼罩,确保操作者的眼睛受到保护

选配:手提式功率计,用于参数预置的技术和精确测试

选配:光学镜片清洁套装

选配:激光维护完全套装,包括红外激光探测器,激光保护眼罩,手提式功率计,光学镜片清洁套装

 

尺寸重量

机器尺寸 (长*宽*高,英寸) 51" X 29" X 67"

整机运输尺寸 (长*宽*高,英寸) 82" X 40" X 92"

运输毛重 (磅) 1650 lbs

尺寸重量

机器尺寸 (长*宽*高,英寸) 51" X 29" X 67"
整机运输尺寸 (长*宽*高,英寸) 82" X 40" X 92"
运输毛重 (磅) 1650 lbs
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